Properties of ZnO:Al Thin Films Deposited by RF Magnetron Sputtering with Various Base Pressure
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چکیده
منابع مشابه
Mechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
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ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2011
ISSN: 1225-8822
DOI: 10.5757/jkvs.2011.20.2.141